Ion Beam Assisted Deposition & Etch

 

Ion beam assisted deposition or IBAD or IAD is a technique which combines an ion beam with simultaneous sputtering or evaporation.

ESC has designed and produced our own systems to carry out ion beam assisted deposition from either evaporation or sputter sources, we have also produced ion beam milling systems based around our own batch systems.

IBAD can also be utilised as a pre or post-clean processes.

Upgrade Performance

Our Ion Beam Assisted Deposition system can be retro-fitted to an existing PVD system to enhance the sputtering or evaporation process.

Industries

Over the years we have worked with a number of clients clients from wide range of industries including: semiconductor, space, optical, automotive, aerospace, packaging, military, nuclear, pharmaceutical, renewable energy, fusion, research & development.